| Size & Weight | 2020x920x1950, 600kg |
|---|---|
| Air Supply | 5~6 bar |
| Work 사양 | Cassette (13” Wafer |
| Size & Weight | 1000(W) x 1500(L) |
|---|---|
| Air Supply | 5~6 bar |
| Tray 사양 | JEDEC Tray, 315x135, 7.6t or 11.2t, 제품(Chip) size: 15x15, ~ 120x120 ( DEVICE ) |
| Size & Weight | MASTER 810x1200x2000, 500kg / MODULE 665x1200x2100, 500kg (1SET 이상의 모듈 추가가능) |
|---|---|
| Air Supply | 5~6 bar |
| Loading Spec | Approx. 15 EA/min supply |